Frictional behavior of Ag nanodot-pattern fabricated by thermal dewetting

► A Ag nanodot-pattern was fabricated on a silicon wafer by a thermal dewetting process. ► The morphology of a nanodot-pattern could be varied by annealing temperature. ► A patterned surface had significantly lower friction compared to a smooth Ag film. ► Variation of friction coefficient coincided with the variation of adhesion force. ► Low frictional behavior of a patterned surface was due to a low Hertzian contact area.