A superhard CrAlSiN superlattice coating deposited by multi-arc ion plating: I. Microstructure and mechanical properties

► A superhard CrAlSiN superlattice coating deposited by a multi-arc ion plating ► Structures of the coating by X-ray diffraction and photoelectron spectroscopy ► Growth mechanism of the coating by high-resolution transmission electron microscopy ► Hardness, adhesion strength and wear behaviors of the coating evaluated