Numerical investigation of the change of dislocation density and microhardness in surface layer of iron targets under the high power ion- and electron-beam treatment

► The role of thermo-stresses and propagating stress wave for modification of dislocation density is clarified. ► Conditions of one or two dislocation density maximums forming are formulated. ► Role of increase of enclosed energy density and reduction of pulse duration is researched. ► Simulated profiles of dislocation density and microhardness for ion and electron irradiation agree with experimental data.