The influence of Ti doping on the mechanical properties of TaN film

► Typical orientation of (111) and (002) appeared in the NaCl-type TixTa1 − xN films. ► The minimal grain size of 13 nm and lattice parameter of 4.28 Å were observed with x = 0.43. ► Ternary TixTa1 − xN had their maximum hardness 33 ± 2 GPa with X = 0.43. ► The maximum adhesion strength of TixTa1 − xN films was 27 GPa with x = 0.43.