Nanostructured multi-element (TiZrNbHfTa)N and (TiZrNbHfTa)C hard coatings

► Multi-element thin films were prepared by DC magnetron sputtering. ► Single FCC solid solution phases were formed. ► Hardness values in the range of 27-33 GPa were measured. ► The best friction and wear performance: (TiZrNbHfTa)C film (μ = 0.15; K = 0.8 × 10− 6 mm3 N− 1 m− 1).