Effects of substrate bias on structure and mechanical properties of (TiVCrZrHf)N coatings

► The substrate bias influences the structure and properties of (TiVCrZrHf)N coatings. ► Surface, structure and mechanical properties of (TiVCrZrHf)N coatings were improved. ► A continuous change in structure, from amorphous to columns with FCC phase was present. ► The hardness of the coatings deposited at 100 V or higher was around 32-33 GPa.