Simple method of hybrid PVD/PECVD to prepare well-dispersed cobalt-plasma polymerized hexamethyldisilazane nanocomposites

► Simple and easy method to prepare Co-pp HMDSN nanocomposites ► Metal filling factor is varied from 4% to 34% using plasma parameters. ► Nanoparticles with size varying from 2 nm to 6 nm are observed. ► Matrix composed of SiO and SiC bonds. Modified with increasing filling factor ► Co-pp HMDSN nanocomposites are suitable as precursors for calcination.