Characterization and oxidation behavior of MTCVD Ti-B-N coatings

► Characterization of Ti-B-N CVD coatings with varying boron-content. ► Correlation of Raman spectroscopy, XPS, XRD and WDS. ► B content above 18 at.% results in TiN + TiB2 formation. ► B content below 18 at.% results in TiN + TiB formation. ► TiB and B2O3 formation increases the oxidation resistance of Ti-B-N coatings.