Microstructure-property relations of reactively magnetron sputtered VCxNy films

► Synthesis of VCN films covering the whole composition range from VN to VC by magnetron sputtering. ► Microstructures ranging from single-phase VN to nanocomposite VCN-C and VC:C. ► Effect of microstructure evolution on mechanical properties. ► Low friction for nanocomposite films of VCN-C type. ► Low friction is a result of a humidity based lubrication mechanism.