Structure, composition, and mechanical characterization of dc sputtered TiN-MoS2 nanocomposite thin films

► MoS2 clusters are formed in the TiN matrix during sputtering co-deposition process. ► MoS2 clusters are nanoscopic in size, homogeneously distributed and mostly amorphous. ► Coatings with low MoS2 concentration have potential for wear resistance applications. ► The study does not confirm MoS2 formation at grain boundaries. ► Neither TiS formation by substitution of S for N in the TiN matrix.