Coherent growth and superhardness effect in VC/Si3N4 nanomultilayers

►Si3N4 does not react with C2H2 in the sputtering condition. ►Transitional metal carbide (VC) could force amorphous materials (Si3N4) crystallized due to “template effect”. ►The carbide-based multilayer can also exhibit coherent growth and get superhardness effect.