کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8037628 | 1518285 | 2018 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Resolution of transmission electron backscatter diffraction in aluminum and silver: Effect of the atomic number
ترجمه فارسی عنوان
تفکیک پراش پرتو الکترونی در آلومینیوم و نقره: اثر شماره اتمی
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی
This work aims to investigate the influence of intrinsic and extrinsic factors on the physical resolution of the transmission electron backscattered diffraction technique (t-EBSD) in aluminum and silver. Here, we focus on the intrinsic factors, namely, atomic number and thickness of the specimen, and extrinsic set-up factors, which include the electron beam voltage, working distance, and specimen tilt. The working distance and tilt angle, which are selected as 12â¯mm and 60° for Al and 12â¯mm and 50° for Ag, respectively, reveal a sharp pattern with high contrast. The physical resolutions at the lateral and longitudinal directions depend on the depth resolution. The depth and lateral and longitudinal resolutions increase in Al but decrease in Ag with increased accelerating voltage. The decrease in specimen thickness for Al and Ag from 400â¯nm to 100â¯nm reduces the lateral and longitudinal resolutions. The most ideal depth and lateral and longitudinal resolutions obtained under a thickness of 100â¯nm are 22.7, 18.9, and 33.7â¯nm at 30â¯kV for Ag and 34.7, 22.8, and 36.6â¯nm at 15â¯kV for Al, respectively.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 193, October 2018, Pages 126-136
Journal: Ultramicroscopy - Volume 193, October 2018, Pages 126-136
نویسندگان
Chia-Wei Kuo, Jui-Chao Kuo, Sheng-Chang Wang,