Design for an aberration corrected scanning electron microscope using miniature electron mirrors

Extensive optical calculations are reported. Aberrations of the micro-mirrors were analyzed by numerical calculation. Dispersion and aberrations of the deflectors were calculated by using an analytical field model. Combination aberrations caused by the off-axis position of dispersive rays in the mirrors and objective lens were also analyzed. It is concluded that the proposed corrector system will be a promising candidate for simple and low-cost aberration correction in low-voltage SEMs.