کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8037869 | 1518308 | 2016 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of scanning thermal microscope probe with ultra-thin oxide tip and demonstration of its enhanced performance
ترجمه فارسی عنوان
تولید پروب میکروسکوپ حرارتی اسکن با نوک اکسید فوق نازک و تظاهرات عملکرد پیشرفته آن
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کلمات کلیدی
میکروسکوپ حرارتی اسکن، میکروسکوپ حرارتی اسکن نقطه ای، نوک اکسید فوق نازک، ثابت زمان حرارت، حساسیت حرارتی، اندازه گیری کمی،
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی
With the vigorous development of new nanodevices and nanomaterials, improvements in the quantitation and resolution of the measurement of nanoscale energy transport/conversion phenomena have become increasingly important. Although several new advanced methods for scanning thermal microscopy (SThM) have been developed to meet these needs, such methods require a drastic enhancement of SThM probe performance. In this study, by taking advantage of the characteristics of micromechanical structures where their mechanical stability is maintained even when the film that composes the structures becomes extremely thin, we develop a new design of SThM probe whose tip is made of ultra-thin SiO2 film (~100Â nm), fabricate the SThM probes, and demonstrate experimentally that the tip radius, thermal time constant, and thermal sensitivity of the probe are all improved. We expect the development of new high-performance SThM probes, along with the advanced measurement methods, to allow the measurement of temperature and thermal properties with higher spatial resolution and quantitative accuracy, ultimately making essential contributions to diverse areas of science and engineering related to the nanoscale energy transport/conversion phenomena.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 171, December 2016, Pages 195-203
Journal: Ultramicroscopy - Volume 171, December 2016, Pages 195-203
نویسندگان
Heebum Chae, Gwangseok Hwang, Ohmyong Kwon,