کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8038354 | 1518338 | 2014 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The development of a 200Â kV monochromated field emission electron source
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We report the development of a monochromator for an intermediate-voltage aberration-corrected electron microscope suitable for operation in both STEM and TEM imaging modes. The monochromator consists of two Wien filters with a variable energy selecting slit located between them and is located prior to the accelerator. The second filter cancels the energy dispersion produced by the first filter and after energy selection forms a round monochromated, achromatic probe at the specimen plane. The ultimate achievable energy resolution has been measured as 36Â meV at 200Â kV and 26Â meV at 80Â kV. High-resolution Annular Dark Field STEM images recorded using a monochromated probe resolve Si-Si spacings of 135.8Â pm using energy spreads of 218Â meV at 200Â kV and 217Â meV at 80Â kV respectively. In TEM mode an improvement in non-linear spatial resolution to 64Â pm due to the reduction in the effects of partial temporal coherence has been demonstrated using broad beam illumination with an energy spread of 134Â meV at 200Â kV.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 140, May 2014, Pages 37-43
Journal: Ultramicroscopy - Volume 140, May 2014, Pages 37-43
نویسندگان
Masaki Mukai, Judy S. Kim, Kazuya Omoto, Hidetaka Sawada, Atsushi Kimura, Akihiro Ikeda, Jun Zhou, Toshikatsu Kaneyama, Neil P. Young, Jamie H. Warner, Peter D. Nellist, Angus I. Kirkland,