Correction of non-linear thickness effects in HAADF STEM electron tomography

► In HAADF STEM, a thickness dependent, non-linear damping of the projected intensities occurs. ► In tomography, this leads to underestimated intensities in the interior of homogeneous particles, the cupping artifact. ► The non-linear damping is demonstrated in experimental images and reproduced with numerical simulations. ► The non-linear damping can be undone if the imaging is done quantitatively. ► Experimental proof is provided showing that cupping can be prevented.