Effect of microscopic parameters on EBSD spatial resolution

► We examine the effect of the accelerating voltage and the probe current on the physical resolution of EBSD for copper. ► We propose a quantitative approach for the determination of the physical spatial resolution of EBSD. ► The best physical lateral and longitudinal resolutions of 34.5 and 44.7 nm were achieved at 10 kV and 1 nA. ► The best physical depth resolution of 38 nm was obtained at 5 kV and 10 nA under the consideration of the channeling effect.