کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8039095 | 1518593 | 2018 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fluence dependent changes of surface morphology and sputtering yield of iron: Comparison of experiments with SDTrimSP-2D
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fluence dependent changes of surface morphology and sputtering yield of iron: Comparison of experiments with SDTrimSP-2D Fluence dependent changes of surface morphology and sputtering yield of iron: Comparison of experiments with SDTrimSP-2D](/preview/png/8039095.png)
چکیده انگلیسی
The influence of surface morphology modifications on the sputtering yield of thin Fe films by monoenergetic Ar ions is studied by using a highly sensitive quartz crystal microbalance (QCM) technique. The morphology changes are induced by prolonged sputtering up to a total Ar fluence of 8â¯Ãâ¯1021â¯mâ2. Atomic force microscopy (AFM) measurements are performed to analyse the sample topography before and after irradiation and to determine surface roughness parameters. Numerical modelling with the codes SDTrimSP and SDTrimSP-2D are performed for comparison. Our investigations show that by using the local distribution of projectile impact angles, as derived from AFM measurements, as well as the elemental composition of the samples as an input to the codes SDTrimSP and SDTrimSP-2D the agreement between experiment and simulations is substantially improved.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 430, 1 September 2018, Pages 42-46
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 430, 1 September 2018, Pages 42-46
نویسندگان
R. Stadlmayr, P.S. Szabo, B.M. Berger, C. Cupak, R. Chiba, D. Blöch, D. Mayer, B. Stechauner, M. Sauer, A. Foelske-Schmitz, M. Oberkofler, T. Schwarz-Selinger, A. Mutzke, F. Aumayr,