کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8041321 1518687 2014 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Synthesis and applications of 18O standards for nuclear reaction analysis
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Synthesis and applications of 18O standards for nuclear reaction analysis
چکیده انگلیسی
A new method to synthesize 18O standard samples to be used in nuclear reaction analyses is proposed and investigated. This method consists of obtaining a Si18O2 film on a Si substrate using a natural abundance SiO2 film as a passivation layer to prevent the isotopically enriched film to be exposed to the atmosphere and possibly degraded by it. For that, sequential oxidation steps are performed followed by a controlled etching in aqueous hydrofluoric acid. Details of these steps are discussed as well as the stability of the synthesized samples. Applications using these standard samples in the field of alternative semiconductors to Si (SiC and Ge), used in micro and nanoelectronics are also presented.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 332, 1 August 2014, Pages 56-59
نویسندگان
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