Depth selective PIXE for surface analysis with low energy heavy ions

A low energy heavy ions PIXE setup was applied for search of trace elements in the subsurface regions. Analysis of elemental composition of standardised foils and thin films PVD evaporated on various substrates at LN2 temperature was performed with the help of SWAN and GUPIX codes. Results for the k-shell X-ray emission cross sections for selected elements were compared to results obtained with swift light ions.