Stiffness research on a high-precision, large-workspace parallel mechanism with compliant joints

Parallel-structure mechanisms, especially the non-backlash compliant parallel mechanisms, excel serial-structure ones in many indexes. This paper explores a novel six-strut compliant parallel mechanism based on the development of wide-range flexure hinges, and in this system the repeatability and resolution of sub-micron scale can be achieved over cubic centimeter motion range. The system stiffness, as a very important performance for compliant parallel mechanisms, directly influences the workspace, load-carrying capacity and driving-load capacity, etc. The system stiffness depends on the parallel mechanism's geometric dimensions and spatial layout, which is discussed in detail in this paper. The stiffness equation of individual flexure hinge is established firstly, and then the stiffness of the whole mechanism is modeled via assembling stiffness matrices and formulating constraint equations. Finally, the system stiffness influence plots are presented and discussed. The stiffness research on the six-strut compliant parallel mechanism provides further theoretical principles for designing and developing this kind of precision parallel devices.