کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
805514 905154 2006 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Optimization of a Wolter type I mirror for a soft X-ray microscope
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
Optimization of a Wolter type I mirror for a soft X-ray microscope
چکیده انگلیسی

The demand for an X-ray microscope has received much attention because of the desire to study living cells under high resolution. A Wolter type I mirror used for soft X-ray microscope optics has a number of advantages. Although much progress has been made, it is still not easy to fabricate this mirror and satisfy the surface roughness and figure error requirements. From the mirror fabrication point of view, it is necessary to see the mirror design and the tolerance budget, especially with respect to the surface roughness and the figure errors. This paper deals with the design and optimization of a Wolter type I microscope mirror. The optimization was carried out by choosing an optimum central grazing incidence angle for which a merit function had the maximum value. The image quality of the mirror was also examined. A smaller diameter gave better image quality because of the Abbe sine condition. Finally, the figure errors for the axial and the radial directions were simulated by sinusoidal deformation waves, and the figure tolerance was obtained.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Precision Engineering - Volume 30, Issue 2, April 2006, Pages 223–230
نویسندگان
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