SF6 usage and emission trends in the TFT-LCD industry

In the TFT-LCD industry, FCs account on average for 30% of total greenhouse gas emissions; 80% of emissions originate from the etching process and 20% from the chemical vapor deposition (CVD) chamber cleaning process, which is in compliance with Taiwan EPA data reports from 2005 to 2010. The leading TFT-LCD manufacturers are Japan, Korea, and Taiwan. The World LCD Industry Cooperation Committee (WLICC) subsequently established an aggressive climate protection action plan in 2001. This study focuses specifically on SF6 usage and emission factors reflecting common TFT-LCD manufacturing practices.