Simulation of ion beam bombardment using Bayfol CR 6-2

In this work, the simulation of ion beam bombardment in Bayfol CR 6-2 polymer at energies varies from 5 keV to 45 keV was determined. The simulation process was made by multiply charged copper and lead ions of different incident angles. The open source computer code SRIM 3D was used for the simulation to determine the ion beam penetrability into the Bayfol CR 6-2 specimens. The range, recoil distribution and total damage of copper and lead ions using Bayfol 6-2 specimens at different energies and incident angles were studied. It was found that the ion range, recoil distribution and total damage at different incident angles on Bayfol 6-2 specimens increases by increasing the ions energy using copper and lead ions respectively.