Femtosecond pulsed laser induced growth of highly transparent indium-tin-oxide thin films: Effect of deposition temperature and oxygen partial pressure

Indium-tin-oxide (ITO) thin films were deposited on glass substrates by femtosecond pulsed laser. The effects of deposition temperature and oxygen partial pressure on structural, optical, electrical and morphological properties have been investigated by XRD, UV–vis spectrometer, four-probe and SEM apparatus. The increased deposition temperature significantly enhanced the optical transparency and sheet resistance of ITO films. It had been found that there exists a minimum of the electrical sheet resistance of ITO films as the oxygen pressure increases.