کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
846061 909158 2015 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Femtosecond pulsed laser induced growth of highly transparent indium-tin-oxide thin films: Effect of deposition temperature and oxygen partial pressure
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
Femtosecond pulsed laser induced growth of highly transparent indium-tin-oxide thin films: Effect of deposition temperature and oxygen partial pressure
چکیده انگلیسی

Indium-tin-oxide (ITO) thin films were deposited on glass substrates by femtosecond pulsed laser. The effects of deposition temperature and oxygen partial pressure on structural, optical, electrical and morphological properties have been investigated by XRD, UV–vis spectrometer, four-probe and SEM apparatus. The increased deposition temperature significantly enhanced the optical transparency and sheet resistance of ITO films. It had been found that there exists a minimum of the electrical sheet resistance of ITO films as the oxygen pressure increases.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - International Journal for Light and Electron Optics - Volume 126, Issue 23, December 2015, Pages 3789–3794
نویسندگان
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