کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
849934 | 909275 | 2013 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A novel method of partial coherence measuring for the illumination system and its defocus performance analysis
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Partial coherence (generally represented by σ) is one of the important parameters of lithographic tool to assess the performance of pupil fill. In this paper, a novel method of partial coherence measurement for the illumination system is proposed. Statistical results of measured σ by the proposed method are analyzed. The dependence of partial coherence on the defocus, which is the distance from the measuring position to the best image plane, is also investigated. The simulation results prove the effectiveness of this method, and with the defocus increasing, the measured partial coherence decreases. Generally, if three times of the standard deviation is required to be 1 × 10−3, the amount of defocus should be less than 96 μm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - International Journal for Light and Electron Optics - Volume 124, Issue 23, December 2013, Pages 6313–6317
Journal: Optik - International Journal for Light and Electron Optics - Volume 124, Issue 23, December 2013, Pages 6313–6317
نویسندگان
Ai-Ping Zhai, Yi-Ping Cao, Bin Chen, Dongmei Cai, Hongye Wei,