Study on current density distribution of electron beam spots by wave optics theory

The image theory of wave electron optics is used to study the current density distribution of electron beam spots for high-resolution electron optical systems. Using the wave aberration concept and paraxial expansion of charge density, the space charge effect is taken into consideration by modification of paraxial rays and spherical aberration coefficient of the lens. The point spreading function is obtained by Fourier–Bessel transform of the optical transfer function considering the space charge and partial coherence of the electron source.