کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
852613 909400 2007 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement
چکیده انگلیسی

A spectral-domain white-light interferometric technique is used for measuring distances in a Michelson interferometer with a mirror represented by a thin-film structure (TFS) on a substrate. A fibre-optic spectrometer is employed for recording spectral interferograms that include wide wavelength range effects of dispersion in a cube beam splitter and multiple reflection within the TFS. Knowing the effective thickness of the beam splitter, its dispersion and parameters of the TFS and substrate, the positions of the second interferometer mirror are determined precisely by a least-squares fitting of the theoretical spectral interferograms to the recorded ones. We apply the technique to the beam splitter made of BK7 optical glass and to a uniform SiO2 thin film on a silicon wafer. We compare the results of the processing that include and do not include the effect of the TFS.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - International Journal for Light and Electron Optics - Volume 118, Issue 7, 6 July 2007, Pages 319–324
نویسندگان
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