کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9566773 | 1503712 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A combinatorial analysis of deposition parameters and substrates on performance of μc-Si:H thin films by VHF-PECVD
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Influence of silane concentration (SC), substrate temperature (Ts) and substrates on the properties of materials deposited by very high frequency plasma enhanced chemical vapor deposition was studied. SC and Ts had a great impact on the structure of materials, especially changed from amorphous to microcrystalline silicon. The results of FTIR (flourier transform infrared) showed that material fabricated at higher temperature appeared a little oxygen peak located at 1017Â cmâ1, which means that oxygen easily entered into the materials at higher Ts. However, microcrystalline silicon thin film prepared at low Ts easily adsorbed oxygen characterized with oxygen content increased largely with the prolong of time. The results of Raman evidently showed that crystalline volume fraction (Xc) also depended on the type and texture of substrate. Higher texture means higher volume crystalline fraction for the same type of substrate.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 245, Issues 1â4, 30 May 2005, Pages 1-5
Journal: Applied Surface Science - Volume 245, Issues 1â4, 30 May 2005, Pages 1-5
نویسندگان
Xiao-dan Zhang, Ying Zhao, Feng Zhu, Chang-chun Wei, Chun-ya Wu, Yan-tao Gao, Jian Sun, Guo-fu Hou, Xin-hua Geng, Shao-zhen Xiong,