کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9566884 1503716 2005 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Auger electron spectroscopy analysis of high metal content micro-structures grown by electron beam induced deposition
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Auger electron spectroscopy analysis of high metal content micro-structures grown by electron beam induced deposition
چکیده انگلیسی
An auger electron spectroscopy study was carried out on Rh-containing micro-structures grown by electron beam induced deposition (EBID) of the iso-structural and iso-electronic precursors [RhCl(PF3)2]2 and [RhCl(CO)2]2. A material containing between 55 and 60 at.% Rh was obtained from both precursors. The chemical composition of structures grown from the two different precursors indicates a similar decomposition mechanism. Deposits grown from [RhCl(PF3)2]2 showed a chemical composition independent of electron energy and electron dose in the investigated range of conditions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 242, Issues 1–2, 31 March 2005, Pages 107-113
نویسندگان
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