کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9566954 | 1503709 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Excimer pulsed laser deposition and annealing of YSZ nanometric films on Si substrates
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کلمات کلیدی
Yttria-stabilised zirconiaX-ray reflectivity - بازتاب پرتو ایکس، بازتاب سنج پرتوایکسAnnealing treatments - درمان آنیلPulsed laser deposition - لایهنشانی یا رسوبنشانی به کمک لیزر پالسی یا سایش لیزریElectron microscopy - میکروسکوپ الکترونیGrazing incidence X-ray diffraction - پراکنش اشعه ایکس بروز گاو
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We report experimental results obtained for electrical and structural characteristics of yttria-stabilised zirconia (YSZ) thin films deposited by pulsed laser deposition (PLD) on Si substrates at room temperature. Some samples were submitted to thermal treatments in different ambient atmospheres (vacuum, N2 and O2) at a moderate temperature. The effects of thermal treatments on the film electrical properties were studied by C-V and I-V measurements. Structural characteristics were obtained by X-ray diffraction (XRD), X-ray reflectivity (XRR) and transmission electron microscopy (TEM) analyses. The as-deposited film was amorphous with an in-depth non-uniform density. The annealed films became polycrystalline with a more uniform density. The sample annealed in O2 was uniform over all the thickness. Electrical characterisation showed large hysteresis, high leakage current and positive charges trapped in the oxide in the as-deposited film. Post-deposition annealing, especially in O2 atmosphere, improved considerably the electrical properties of the films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 248, Issues 1â4, 30 July 2005, Pages 270-275
Journal: Applied Surface Science - Volume 248, Issues 1â4, 30 July 2005, Pages 270-275
نویسندگان
A.P. Caricato, G. Barucca, A. Di Cristoforo, G. Leggieri, A. Luches, G. Majni, M. Martino, P. Mengucci,