کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9567291 | 1503713 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Study on ECR dry etching and selective MBE growth of AlGaN/GaN for fabrication of quantum nanostructures on GaN (0Â 0Â 0Â 1) substrates
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
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چکیده انگلیسی
This paper attempts to form AlGaN/GaN quantum wire (QWR) network structures on patterned GaN (0 0 0 1) substrates by selective molecular beam epitaxy (MBE) growth. Substrate patterns were prepared along ã112¯0ã- and ã11¯00ã-directions by electron cyclotron resonance assisted reactive-ion beam etching (ECR-RIBE) process. Selective growth was possible for both directions in the case of GaN growth, but only in the ã112¯0ã-direction in the case of AlGaN growth. A hexagonal QWR network was successfully grown on a hexagonal mesa pattern by combining the ã112¯0ã-direction and two other equivalent directions. AFM observation confirmed excellent surface morphology of the grown network. A clear cathodoluminescence (CL) peak coming from the embedded AlGaN/GaN QWR structure was clearly identified.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 244, Issues 1â4, 15 May 2005, Pages 84-87
Journal: Applied Surface Science - Volume 244, Issues 1â4, 15 May 2005, Pages 84-87
نویسندگان
Takeshi Oikawa, Fumitaro Ishikawa, Taketomo Sato, Tamotsu Hashizume, Hideki Hasegawa,