کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9567716 | 1503720 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Wirelike growth of self-assembled hafnium silicides: oxide mediated epitaxy
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
A wirelike shape of Hf silicides, which is not observed in silicides directly grown on Si (0 0 1), has been obtained by oxide mediated epitaxy (OME). Hafnium deposition (â¼0.4 and â¼0.2 ML) onto ultrathin (â¼1 nm) SiO2 and annealing at 900°C resulted in the formation of self-assembled wirelike silicides via a silicate phase (Hf-O-Si bonding units) in the 600-800°C temperature range. Silicide nanowires were found to be encapsulated in the bundle aggregates. The number density of OME-grown silicides apparently decreased as a form of nanowire bundles along with an increasing aspect ratio compared with the directly grown disilicides on Si (0 0 1). This finding has an implication for the use of an ultrathin SiO2 layer in controlling the tradeoff between the number density and the aspect ratio of self-assembled silicides.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 239, Issues 3â4, 31 January 2005, Pages 268-272
Journal: Applied Surface Science - Volume 239, Issues 3â4, 31 January 2005, Pages 268-272
نویسندگان
Jung-Ho Lee,