کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9567760 | 1503720 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Direct measurement of sidewall roughness of polymeric optical waveguides
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
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چکیده انگلیسی
Sidewall roughness (SWR) of fluorinated polyether waveguides fabricated using reactive ion etching in pure oxygen gas was directly measured using atomic force microscopy (AFM). We confirm that SWR is not the replicate of line edge roughness (LER) of the waveguides. Statistical information such as standard deviation of roughness, autocovariance function (ACF), and autocorrelation length (ACL) have been obtained from AFM measurements. The ACL varies in the similar manner as SWR along the depth of the waveguide, and both are dependent on the etch depth. The depth dependence can be explained by the change in the arrival dynamics of etchant ions in a mechanism involving both shadowing and first-order reemission effects.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 239, Issues 3â4, 31 January 2005, Pages 445-450
Journal: Applied Surface Science - Volume 239, Issues 3â4, 31 January 2005, Pages 445-450
نویسندگان
S.K. Pani, C.C. Wong, K. Sudharsanam, V. Lim,