کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9568597 1503714 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
The deepness enhancing of an AFM-tip induced surface nanomodification
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
The deepness enhancing of an AFM-tip induced surface nanomodification
چکیده انگلیسی
The novel method of the semiconductor nanostructuring (TINE&MEMO) has been developed on the base of the simultaneous AFM-tip induced local anodic oxidation and mechanical modification of the surface under the applying of advanced electric potentials. The TINE&MEMO-based technology allows obtaining the principle new scale of the depth up to 100 nm for the nanostructure fabrication with a low aspect relation between the width and deepness. The developed nanoscale AFM-lithography has been clearly demonstrated on titanium, gallium arsenide and silicon substrates for creation of electronic nanodevices.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 243, Issues 1–4, 30 April 2005, Pages 138-142
نویسندگان
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