Analysis of new electrical signals in respect to quantification of radio frequency glow discharge emission spectrometry

Radio frequency glow discharge optical emission spectroscopy (RF-GD-OES) is routinely used for the chemical analysis of solid samples. For quantification two independent electrical signals of the discharge are required. These are provided in real time by the glow discharge source with integrated voltage and current sensors. The available time-dependent voltage and current must be reduced. For this purpose a plasma equivalent circuit is used. It is shown that the cathode voltage and active cathode current describe the sputtering and excitation well. Measuring standard reference materials at constant cathode voltage and cathode current results in linear calibration curves.