کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9572202 1388504 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Analysis of new electrical signals in respect to quantification of radio frequency glow discharge emission spectrometry
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Analysis of new electrical signals in respect to quantification of radio frequency glow discharge emission spectrometry
چکیده انگلیسی
Radio frequency glow discharge optical emission spectroscopy (RF-GD-OES) is routinely used for the chemical analysis of solid samples. For quantification two independent electrical signals of the discharge are required. These are provided in real time by the glow discharge source with integrated voltage and current sensors. The available time-dependent voltage and current must be reduced. For this purpose a plasma equivalent circuit is used. It is shown that the cathode voltage and active cathode current describe the sputtering and excitation well. Measuring standard reference materials at constant cathode voltage and cathode current results in linear calibration curves.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 1, 30 September 2005, Pages 261-265
نویسندگان
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