Radiation source dependence of performance degradation in thin gate oxide fully-depleted SOI n-MOSFETs

The degradation of the electrical performance of thin gate oxide fully depleted SOI n-MOSFETs and its dependence on the radiation particles are investigated. The transistors are irradiated with 7.5-MeV protons and 2-MeV electrons at room temperature without bias. The shift of threshold voltage and the coupling effect with the degraded opposite gate are clarified. A remarkable reduction of the floating body effects is observed after irradiation. The degradation of the extracted parameters is discussed by a comparison with the damage coefficients.