کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9681027 | 1455509 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The removal of silicon and boron from ultra-pure water by electrodeionization
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی شیمی
تصفیه و جداسازی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The method for removal of silicon and boron from ultra-pure water by EDI (electrodeionization) was investigated. By investigating electric current, conductivity, flow of feed water in dilute and concentrate chambers, and pH value, the optimal conditions for removal of silicon and boron are obtained. With 1000 μg/L SiO2 in feed water, the concentration of silicon in product water can be decreased to 2.66 μg/L, which is currently the best result in our country. With 50 μg/L boron in feed water, less than 1 μg/L boron in product water can be obtained. All these results meet the requirements for ULSI (ultra large scale integrated circuits) (silicon: â¤3 μg/L, boron: â¤1 μg/L).
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Desalination - Volume 181, Issues 1â3, 5 September 2005, Pages 153-159
Journal: Desalination - Volume 181, Issues 1â3, 5 September 2005, Pages 153-159
نویسندگان
Ruimei Wen, Shouquan Deng, Yafeng Zhang,