Selective growth of carbon nanotubes on nickel oxide templates created by atomic force microscope nano-oxidation

The selective growth of carbon nanotubes on nickel oxide templates of square blocks of size 2×2 μm2 on Si by a microwave-heated CVD has been successfully demonstrated. By applying a negative bias to a conductive tip, nickel oxide patterns were first created by the process of nano-oxidation. The unoxidized nickel film was then removed using a wet chemical etch technique, thereby forming nickel oxide templates over which the carbon nanotubes were grown. We also obtained single carbon nanotubes on nickel oxide nanodots that have diameters as small as 100 nm. The selective growth of CNTs over nickel oxide templates could be also fulfilled on not nickel-etched substrate by appropriately controlling the growth temperature and growth time.