کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9778195 | 1510574 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Optical properties of hydrogenated amorphous carbon thin films prepared by dc saddle field plasma-enhanced chemical vapor deposition
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Hydrogenated amorphous carbon thin films were grown through dc saddle field plasma-enhanced chemical vapor deposition. All samples were grown in similar conditions, except that the chamber pressure and the substrate bias parameters were varied. The sample films were analyzed using Ultraviolet-Visible, Fourier Transform Infrared, and Raman spectroscopies. The Ultraviolet-Visible analysis was used in order to obtain the wavelength dependence of the index of refraction, the extinction coefficient, and the optical absorption coefficient. The index of refraction was found to increase as a function of the substrate bias voltage. Fourier Transform Infrared spectroscopic and Raman analyses were used in order to obtain the concentration of the sp2 carbon bonds in the films. This measurement helped us interpret the relation between the sp2 bond concentration and the optical absorption in the a-C:H thin films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Non-Crystalline Solids - Volume 351, Issues 8â9, 1 April 2005, Pages 736-740
Journal: Journal of Non-Crystalline Solids - Volume 351, Issues 8â9, 1 April 2005, Pages 736-740
نویسندگان
Simone Pisana, Stephen K. O'Leary, Stefan Zukotynski,