کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9784095 | 1512029 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effects of deposition temperature on the microstructural and electrical properties of praseodymium oxide-based films
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effects of deposition temperature on the microstructural and electrical properties of praseodymium oxide-based films Effects of deposition temperature on the microstructural and electrical properties of praseodymium oxide-based films](/preview/png/9784095.png)
چکیده انگلیسی
Praseodymium oxide-based dielectric thin films have been grown using metal-organic chemical vapor deposition (MOCVD) technique on p- and n-type Si (0 0 1) substrates. X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) analyses have revealed that depositions at 750 °C in 1.33 Ã 10â1 Pa oxygen partial pressure have produced Pr2O3 films with a praseodymium silicate bottom layer. The influence of deposition temperature has been evaluated carrying out deposition experiments in the 450-850 °C range. The structural characterization of praseodymium oxide-based films has been performed using X-ray diffraction and transmission electron microscopy (TEM). Films deposited in the low deposition temperature range (450-650 °C) are quite amorphous and the praseodymium silicate bottom layer thickness is smaller than in the case of high temperature deposited films. In the 650-850 °C deposition temperature range hexagonal Pr2O3 polycrystalline films have been grown. Finally, the electrical properties of both amorphous and polycrystalline praseodymium oxide films have been investigated and compared.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science and Engineering: B - Volume 118, Issues 1â3, 25 April 2005, Pages 117-121
Journal: Materials Science and Engineering: B - Volume 118, Issues 1â3, 25 April 2005, Pages 117-121
نویسندگان
Raffaella Lo Nigro, Roberta G. Toro, Graziella Malandrino, Patrick Fiorenza, Vito Raineri, Ignazio L. Fragalà ,