کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9784132 1512029 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Oxidation of macroporous silicon for thick thermal insulation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
Oxidation of macroporous silicon for thick thermal insulation
چکیده انگلیسی
A thick porous silicon dioxide (SiO2, 60 μm) has been fabricated from macroporous silicon (macro-PS) by electrochemical etching from p-type Si. The macro-PS was produced using hydrofluoric acid-dimethyl sulphoxide (HF-DMSO) as an electrolyte giving a 1-1.5 μm pore size and a porosity of 55-75% for various electrolyte concentrations in the electrolytic cell. Wet oxidation with steam was then carried out at 1050 °C. Using this simple and low cost process a 60 μm porous oxide layer is created in 3 h. The evolution of the porous SiO2 layer was characterized by scanning electron microscopy. Thick porous SiO2 layers is well suited for thermal insulating functions in devices as the thermal conductivity of a porous layer is lower than that of bulk SiO2, making such layers attractive for fabrication of devices such as, for example flow sensors and infrared sensors.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science and Engineering: B - Volume 118, Issues 1–3, 25 April 2005, Pages 289-292
نویسندگان
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