Measurement technique for surface profiling in low-coherence interferometry

A measurement technique for surface profiling in low-coherence interferometry has been proposed. Two interference signals with π/2 phase shift and two bias intensities of reference and object beams have been measured for calculating the modulus of the complex degree of coherence. A three-dimensional profile of a tilted surface extracted by measuring a distribution of the modulus of the complex degree of coherence has been shown.