کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9785795 | 1512656 | 2005 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Application of quantitative X-ray phase retrieval from Fraunhofer diffraction data to nano-resolution profiling of materials
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Application of quantitative X-ray phase retrieval from Fraunhofer diffraction data to nano-resolution profiling of materials Application of quantitative X-ray phase retrieval from Fraunhofer diffraction data to nano-resolution profiling of materials](/preview/png/9785795.png)
چکیده انگلیسی
X-ray Fraunhofer diffraction data have been collected from a series of weakly thickness-modulated samples using a synchrotron source. Three different areas of a linear Fresnel zone structure etched in a silicon wafer each 10 μm wide were studied. Each area studied included different numbers of zones, ranging from 6 to 20. An X-ray phase retrieval technique was used to profile the complex refractive index within the areas examined. The zone structure thickness profiles were mapped with a spatial resolution of 100 nm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics Communications - Volume 251, Issues 1â3, 1 July 2005, Pages 100-108
Journal: Optics Communications - Volume 251, Issues 1â3, 1 July 2005, Pages 100-108
نویسندگان
A.V. Darahanau, A.Y. Nikulin, A. Souvorov, Y. Nishino, B.C. Muddle, T. Ishikawa,