Tolerance analysis of 4 × 4 SU-8 polymer array waveguide grating

In this paper, we have designed a low loss, low crosstalk and low PDL SU-8 polymeric wavelength division multiplexing-array waveguide grating (WDM-AWG). Furthermore, we also simulate and analyze many 4 × 4 polymer WDM-AWGs under the tolerance consideration. We present results of tolerance simulations in this paper with considering width and height of waveguide, crosstalk, power loss, PDL, etc. in the temperature range 0-70 °C. The optimal design for the channel spacing 200 GHz 4 × 4 SU-8 polymeric WDM-AWGs wavelength division multiplexing functionalities are demonstrated. The research results demonstrate that such a device can have ±0.6 μm for height and ±1.0 μm for widths tolerances in polymetric waveguide fabricating process.