Talbot-SNOM method for non-contact evaluation of high-density gratings

A Talbot scanning near-field optical microscopy (SNOM) method for non-contact evaluating of high-density gratings was described. This method combines the Talbot self-imaging effect of the gratings and the conventional SNOM technique without damage. The significant advantages of this method are its simple structure, reliable and fast measurement for the surface quality of the tested gratings. Experimental results of three different kinds of gratings were demonstrated to indicate that this method is effective for evaluation surface quality of high-density gratings.