کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9809475 1517710 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Optical and electronic properties of CrOxNy films, deposited by reactive DC magnetron sputtering in Ar/N2/O2(N2O) atmospheres
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Optical and electronic properties of CrOxNy films, deposited by reactive DC magnetron sputtering in Ar/N2/O2(N2O) atmospheres
چکیده انگلیسی
Chromium oxynitride films CrOxNy were prepared by reactive magnetron sputtering from a chromium target in Ar/O2(N2O)/N2 gas mixtures. The argon-to-nitrogen partial pressure ratio and the DC discharge power were kept constant in the experiments. By changing the gas composition the film stoichiometry can be continuously varied from CrN to Cr2O3. The film composition has been determined by Rutherford backscattering (RBS) and by elastic recoil detection analysis (ERDA). From an XRD analysis it was concluded that the films consist of CrN nanocrystals in an amorphous oxide matrix. Depending on the oxygen content [O], the electronic behaviour of the films changes, accompanied by the evolution of an optical band gap, which was determined by spectral transmission and reflection measurements. The (negative) temperature coefficient at ≈ 300 K of the resistivity of the films is in the range of 0.5 (CrN) to 2% K−1 (CrO0.5N0.7). This film property can be used for temperature-dependent resistors, for instance in thermal radiation detectors.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 200, Issues 1–4, 1 October 2005, Pages 341-345
نویسندگان
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