کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9809693 | 1517714 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Size and energy distribution of gas cluster ion beam measured by energy resolved time of flight mass spectroscopy
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Using ERTOF, it was found that the GCIB consisted of two components; small sized clusters with low kinetic energy and large sized clusters with high kinetic energy. It was also noted that the depth to which a substrate, on which the cluster beam impinged, was etched increased with the proportion of large clusters to the GCIB, since the small clusters, resulting from disintegration of large sized clusters by collisions with monomer ions, fast neutrals and residual gas molecules, have too low a kinetic energy to remove atoms from the surface. Note that the etched depth was affected by both the energy and size distribution of cluster ions. Therefore, ERTOF measurement could be utilized to assure the reproducibility of processes for the manufacture of semiconductors and magnetic recording heads.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 196, Issues 1â3, 22 June 2005, Pages 198-202
Journal: Surface and Coatings Technology - Volume 196, Issues 1â3, 22 June 2005, Pages 198-202
نویسندگان
Shigeru Kakuta, Toshio Seki, Shinji Sasaki, Kenji Furusawa, Takaaki Aoki, Jiro Matsuo,