Effect of electron temperature on the DLC film properties

In this paper, we try to find out the key factors that control the film properties, from the viewpoint of plasma chemistry. The electron-density distribution in plasma is measured with a Langmuir probe while DLC films are formed on the specimen surfaces of both silicon and tungsten carbide (WC). Hardness and scratch tests are carried out to evaluate the mechanical characteristics of the films. The solid-state structures are investigated by Raman spectroscopy. As a result, it is shown that the electron temperature of plasma strongly affects the film properties such as friction, wear and hardness.