Influence of ion energies on the surface morphology of carbon films

Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.